Gás octafluorocyclopentene

Is pointe fiuchphointe tocsaineach, neamh-inlasta, íseal (81 céim f) leacht gan dath é octafluorocyclopentene le boladh beag sainiúil .

Octafluorocyclopentene le 99 . 99% Soláthraithe Monaróra íonachta Jiangsu Mr Chemical Co., Ltd

CAS: 559-40-0

Einecs: 209-203-0

NA: 2810

Foirmle Mhóilíneach: C5F8

Octafluorocyclopentene gas is gaining recognition as a superior etching medium in semiconductor fabrication due to its unique cyclic molecular structure. Unlike linear perfluorocarbons, octafluorocyclopentene gas demonstrates exceptional plasma stability and precise etching characteristics that enable superior profile control in high aspect ratio features. The gas's relatively high boiling point (-6°C) allows for easier handling compared to other etching gases, while its density (approximately 6.8 times heavier than air) requires specific safety protocols to prevent accumulation in confined spaces. Recent breakthroughs in 3D NAND flash memory production have particularly benefited from octafluorocyclopentene gas's ability to maintain consistent etch rates across deep trench structures. Environmental considerations surrounding octafluorocyclopentene gas focus on its global warming potential (estimated GWP of 7,200), prompting development of advanced abatement systems that can destroy over 99% of used gas. The compound's thermal stability (decomposition temperature >550 céim) a fhágann go bhfuil sé chomh luachmhar mar mheán tréleictreach i dtrealamh speisialaithe ardvoltais ina dteipeann ar inslitheoirí traidisiúnta .

Úsáidtear octafluorocyclopentene (OFCP) go príomha sa tionscal leathsheoltóra, go háirithe i gcás próiseas eitseáil plasma . Is ábhar tosaigh é freisin chun comhdhúile eile a shintéisiú a úsáidtear i bhfeistí optoelectronic agus feidhmchlár eile .

• Úsáid i gcónaí de réir an bhileog sonraí sábháilteachta (SDS) .
• Ní mór sorcóir a stóráil agus a úsáid i suíomh díreach, urraithe i limistéar dea-aeráilte nó monatóireachta .
• Lean riachtanais an chóid dóiteáin áitiúla i gcónaí agus sorcóirí gáis á stóráil .
• Guaiseacha móra: tine, plúchadh .

Clibeanna Te: gás octafluorocyclopentene, monaróirí gáis, soláthróirí, monarcha na Síne octafluorocyclopentene